Circuit Editing of Gold Connecting Electrodes Using a Focused Ion Beam Microscope

Author(s):

Jonathan Ligda and Mary Beth Galanko

Abstract:

The fabrication of a newly designed acoustic resonator has resulted in some faulty devices due to gold electrodes either being connected or too far apart. This has limited the number of devices available for testing. Fortunately, these devices can be edited with a focused ion beam microscope, making them functional again. This technical note describes the process of editing these gold electrodes through both subtractive and additive means.