Focused-Ion Beam (FIB) Transmission Electron Microscopy (TEM) Sample Preparation
Report Number:
ARL-TR-10031
Publish Date:
December 2, 2024
Distribution:
Approved for public release: distribution is unlimited.
Author(s):
Wendy L. Sarney, B. Chad Hornbuckle, and Asher C. Leff
Abstract:This report explains the basics of focused-ion beam (FIB) sample preparation, and its advantages for fabricating certain types of materials and device structures for scanning transmission electron microscopy (TEM). The FIB used is the Thermo–Fischer Helios 5 at Aberdeen Proving Ground, Maryland. This report has detailed schematic illustrations, pictures, and instructions of the complex steps needed for making high-quality TEM samples with FIB.
File Size:
6 MB