Standard Operating Procedure for On-Chip Porous Silicon Surface Functionalization
Report Number:
ARL-TR-9517
Publish Date:
August 22, 2022
Distribution:
Approved for public release: distribution is unlimited.
Author(s):
Nathan A Banek and Wayne A Churaman
Abstract:A standard operating procedure for a Schlenk line, degassing solvents by the freeze–pump–thaw method, and porous silicon (pSi) functionalization is detailed. On-chip pSi devices were prepared by anodic etching in 3:1 hydrofluoric acid: ethanol (v/v) solution and subsequently functionalized with 1-octene by thermal hydrosilylation. The chips demonstrated good protection from ambient air moisture.
File Size:
681 KB
