Standard Operating Procedure for On-Chip Porous Silicon Surface Functionalization

Report Number:
ARL-TR-9517

Publish Date:

August 22, 2022

Distribution:

Approved for public release: distribution is unlimited.


Author(s):

Nathan A Banek and Wayne A Churaman

Abstract:

A standard operating procedure for a Schlenk line, degassing solvents by the freeze–pump–thaw method, and porous silicon (pSi) functionalization is detailed. On-chip pSi devices were prepared by anodic etching in 3:1 hydrofluoric acid: ethanol (v/v) solution and subsequently functionalized with 1-octene by thermal hydrosilylation. The chips demonstrated good protection from ambient air moisture.

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