Molybdenum Disulfide Chemical Vapor Deposition Growth and Raman Characterization
Report Number:
ARL-TR-10464
October 1, 2026
Approved for public release: distribution is unlimited.
Author(s):
Mitchell Hung, Kai Palam, Madan Dubey, and Charles Rong
Abstract:Molybdenum disulfide (MoS2) is a transition metal dichalcogenide (TMD) that has garnered attention as a potential alternative to silicon-based electronics. MoS2 exhibits a direct band gap and is atomically flat and thin, making it ideal for use in transistors and optoelectronics. The ability for MoS2 to be grown in monolayers due to its layered structure—molybdenum sandwiched by sulfur—gives the material a distinct advantage in precise growth. However, the growth of monolayer MoS2 depends on a range of growth factors, including the choice and volume of growth promoters. We analyzed the effects of varying volumes of potassium bromide (KBr), the chosen growth promoter, on the shapes and properties of MoS2 triangles. Using Raman spectroscopy, we observed that different KBr volumes led to changes in the spectral signatures and the formation of MoS2 structures. Furthermore, we found via Raman peak and waveform analysis that lower volumes of KBr resulted in more consistent, repeatable results. This research supports the development of an automatic classification system for MoS2 layers.
